Integrating QUDT with ALD Simulation Template

[SameerSamji]

The ALD Simulation Template has been integrated with the QUDT ontology to enhance the representation of measurement-related properties. The points requiring clarification for this integration are the same as those outlined in the following issue:

Integrating QUDT with ALD Experimental Template

ALD Simulation Schema with QUDT can be found here: https://orkg.org/template/R1368294

[SameerSamji]

Based on the finalized ALD simulation schema, the following properties have been identified that can be partially or fully grounded using the QUDT ontology:

timestep, growthRate, temperatureDependence, desorptionRate, diffusionRate, reactionRate, bindingAffinity, surfaceCoverage, chemisorbedPrecursorDensity, surfaceHydroxylConcentration, activationEnergy, adsorptionEnergy, uniformity, roughness, density, temperatureProfile, pressure, carrierGasFlow, flowRate, pulseDuration, purgeDuration, gapDistance, nucleationDelay

As with the ALD experimental schema, not all of these properties can be fully grounded using QUDT. While some have corresponding QuantityKind definitions and applicable units, others may only be partially represented within the current QUDT vocabulary.

A detailed description of the grounding approach, can be found here.